Low contact force, 0.1N!

Best suited for detecting fragile or deformable fine workpieces such as semiconductors and ceramic tools.

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Operating upper limit temperature 150℃ / 200℃!

Best suited for positioning under high-temperature environments such as in metallic molding or injection molding.

10^-5Pa high vacuum class-compatible switches.

Best suited for positioning under vacuum environment where mask or wafer is detected in semiconductor production system.

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